The Nano fabrication theme focuses on developing equipment, processes and technology and how these can contribute to breakthroughs in other NanoNextNL themes.
Nano fabrication is creating and characterising a 2-dimensional or 3-dimensional structure with sub-100 nanometre features in a material of choice. Compared to the nano patterning possibilities of today, the challenge is to build smaller, more accurate, faster and more flexible, for instance by patterning directly in the material of choice. For nano-inspection, challenges include enabling live imaging during actual processes, such as catalysis and pulsed laser deposition, as well as correlative microscopies that combine e.g. electron and optical microscopies and thus merge the strengths of such techniques into a single instrument.